Silicon wafer graphite boat clamp note:
1. The outermost side of the assembled graphite boat is the outer boat page, the second is the secondary outer boat page, the third is the right angle page, the fourth is the fillet page, and the fifth is the fillet, and so on.
2. The eleventh piece is the electrode page. The direction of the electrode is the direction of the skew of the piece. Determine the orientation of the boat foot when loading the boat block. The ceramic rod and ceramic ring are used to fix the orientation between the boat pages and are located in the middle;
3. The carbon fiber rod fixes the orientation of the graphite block and the boat page, receives the component of the graphite boat, sits at both ends, and the orientation of the boat is opposite to the electrode direction.
4. Watch out
(1) The graphite boat is fragile and should be handled with care;
(2) Pay attention to the same direction of process points, and pay attention to the electrode direction, electrode page and electrode block orientation
(3) Damage of process card points;
(4) Ceramic rods and carbon fiber rods shall be fastened with double nuts.
