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PECVD Graphite Boat: Core Fixture for Photovoltaic & Semiconductor

PECVD graphite boat is a special carrier for silicon wafer thin film deposition, widely used in solar cell and semiconductor manufacturing. Jiecheng Graphite machines high-precision PECVD graphite boats from isostatic graphite.

Port：Qingdao Port

Packing：Plywood Case

Delivery time：5-7days

Minimum order quantity：5 pieces

Supply Ability：10000 pieces/month

  • Products
    Detail

  • Physical And
    Chemical Index

  • Packing

  • Related
    roducts

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PECVD graphite boat is a special carrier for silicon wafer thin film deposition, widely used in solar cell and semiconductor manufacturing. Jiecheng Graphite machines high-precision PECVD graphite boats from isostatic graphite.

Key Features Ultra-high purity reduces particle pollution on wafers. Fine-grain isostatic graphite delivers outstanding thermal shock resistance. Accurate wafer slot spacing ensures consistent film deposition. Dense structure slows oxidation and extends service life. The surface can be treated with anti-oxidation coating on request.

PECVD Graphite Boat

Typical Applications

  • Solar cell PECVD coating production
  • Silicon wafer diffusion and thin film deposition
  • Semiconductor substrate thermal treatment
  • Optical electronic material coating process

Every PECVD graphite boat is inspected for flatness and slot tolerance before delivery. We support matching design for different equipment models.


Physical and chemical indicators of graphite crucible.

Density

g/cm3

Resistivity

μΩm

Breaking strength

Mpa

Compression strength

Mpa

Ash

%

Graininess

mm

≥

≤

≥

≥

≤

1.62

8.0

18.0

28.0

0.3

1,2,4mm

1.72

7.5

20.0

36.0

0.3

0.8,2mm

1.75

7.5

24.0

45.0

0.3

0.045mm

1.80

7.5

28.0

52.0

0.3

0.045mm

1.85

7.0

36.0

62.0

0.1

0.045mm


Packaging & Delivery

  • Packaging Details:Wooden case or as your requirments

  • Port:Qingdao/Tianjin



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