一级标题
一级标题

+86 139 2251 6726

CN
Products

Graphite Product

Inquiry Now

How to Extend the Service Life of PECVD Graphite Boats

PECVD graphite boats suffer from progressive failure including surface silicon accumulation, slot wear, edge chipping and oxidation after dozens or hundreds of coating cycles. Service life depends on material grade, machining quality, surface protection and daily operation and maintenance.

Port：Qingdao Port

Packing：Plywood Case

Delivery time：5-7days

Minimum order quantity：5 pieces

Supply Ability：10000 pieces/month

  • Products
    Detail

  • Physical And
    Chemical Index

  • Packing

  • Related
    roducts

  • Inquiry
    Now

product_detail

PECVD graphite boats suffer from progressive failure including surface silicon accumulation, slot wear, edge chipping and oxidation after dozens or hundreds of coating cycles. Service life depends on material grade, machining quality, surface protection and daily operation and maintenance.

PECVD graphite boats

High-density fine grain graphite is the base for long-cycle use. Coating is a critical upgrade option; it isolates graphite from direct contact with plasma and reactive gas, slowing down erosion and silicon adhesion. During operation, avoid violent collision when loading and unloading. Regular professional cleaning removes silicon deposits without scratching the graphite substrate. Timely sorting out boats with deformed slots prevents mass wafer breakage.

Jiecheng Graphite supplies new PECVD graphite boats and also provides recoating, repair and rework service for old boats. We support small-batch trial production for new processes and mass delivery with stable consistency, helping photovoltaic and semiconductor manufacturers lower spare part cost and stabilize coating yield.

Physical and chemical indicators of graphite crucible.

Density

g/cm3

Resistivity

μΩm

Breaking strength

Mpa

Compression strength

Mpa

Ash

%

Graininess

mm

≥

≤

≥

≥

≤

1.62

8.0

18.0

28.0

0.3

1,2,4mm

1.72

7.5

20.0

36.0

0.3

0.8,2mm

1.75

7.5

24.0

45.0

0.3

0.045mm

1.80

7.5

28.0

52.0

0.3

0.045mm

1.85

7.0

36.0

62.0

0.1

0.045mm


Packaging & Delivery

  • Packaging Details:Wooden case or as your requirments

  • Port:Qingdao/Tianjin



Related Products

How to Choose Qualified Graphite Products and Avoid Premature Failure How to Choose Qualified Graphite Products and Avoid Premature Failure

How to Choose Qualified Graphite Products and Avoid Premature Failure

Common Application Fields of Industrial Graphite Machined Products Common Application Fields of Industrial Graphite Machined Products

Common Application Fields of Industrial Graphite Machined Products

Graphite Products: Core Properties That Make Graphite Ideal for High-Temperature Industry Graphite Products: Core Properties That Make Graphite Ideal for High-Temperature Industry

Graphite Products: Core Properties That Make Graphite Ideal for High-Temperature Industry

Inquiry Now

If you have any questions, feedback or comments, please fill out the form below and we will reply you back as soon as possible.