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Key Performance Indicators of Qualified PECVD Graphite Boats

Many production failures such as color deviation, high fragment rate and frequent cleaning are caused by substandard graphite boats. Four indicators must be checked before order confirmation: graphite purity, bulk density, slot machining accuracy and surface treatment quality.

Port：Qingdao Port

Packing：Plywood Case

Delivery time：5-7days

Minimum order quantity：5 pieces

Supply Ability：10000 pieces/month

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Many production failures such as color deviation, high fragment rate and frequent cleaning are caused by substandard graphite boats. Four indicators must be checked before order confirmation: graphite purity, bulk density, slot machining accuracy and surface treatment quality.

PECVD graphite boats

High-purity low-ash graphite avoids heavy metal contamination which would cause cell efficiency attenuation. Higher bulk density improves wear resistance and reduces particle shedding. The slot position, depth and opening clearance need precise CNC machining; uneven spacing will break plasma balance and lead to inconsistent film thickness. Anti-sticking coating can effectively reduce silicon deposition on the graphite surface and cut downtime for cleaning.

Jiecheng Graphite provides full dimension inspection reports and material test reports for each batch of PECVD graphite boats. We optimize fillet and chamfer design to relieve stress concentration. Our engineering team can modify existing boat structures according to your feedback on film unevenness or wafer sticking.

Physical and chemical indicators of graphite crucible.

Density

g/cm3

Resistivity

μΩm

Breaking strength

Mpa

Compression strength

Mpa

Ash

%

Graininess

mm

≥

≤

≥

≥

≤

1.62

8.0

18.0

28.0

0.3

1,2,4mm

1.72

7.5

20.0

36.0

0.3

0.8,2mm

1.75

7.5

24.0

45.0

0.3

0.045mm

1.80

7.5

28.0

52.0

0.3

0.045mm

1.85

7.0

36.0

62.0

0.1

0.045mm


Packaging & Delivery

  • Packaging Details:Wooden case or as your requirments

  • Port:Qingdao/Tianjin



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